Manufacturable Process/Tool for High- /Metal Gate by Rajendra Singh, Aarthi Venkateshan

Manufacturable Process/Tool for High- /Metal Gate

Rajendra Singh, Aarthi Venkateshan

204 pages missing pub info (editions)

nonfiction art technology
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Description

Off state leakage current related power dominates the CMOS heat dissipation problem of state of the art silicon integrated circuits. In this study, this issue has been addressed in terms of a low-cost single wafer processing (SWP) technique using ...

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