Optical Admittance Loci Monitoring for Thin Film Deposition by Cheng-Chung Lee, Kai Wu, Tzu-Ling Ni

Optical Admittance Loci Monitoring for Thin Film Deposition

Cheng-Chung Lee, Kai Wu, Tzu-Ling Ni

148 pages missing pub info (editions)

nonfiction science
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Description

To deposit a thin film coating with the correct thickness and refractive index is very important for precision optics. There are several methods have been proposed to monitoring the thickness of each layer for a multilayer optical filter during th...

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