Engineering Thin Films and Nanostructures with Ion Beams by

Engineering Thin Films and Nanostructures with Ion Beams

Optical Science and Engineering

592 pages missing pub info (editions)

nonfiction art technology
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While ion-beam techniques have been used to create thin films in the semiconductor industry for several decades, these methods have been too costly for other surface treatment applications. However, as manufacturing devices become increasingly sma...

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