Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications by David Cameron, Tommi Kääriäinen, Marja-Leena Kääriäinen

Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications

David Cameron, Tommi Kääriäinen, Marja-Leena Kääriäinen

253 pages missing pub info (editions)

nonfiction art science technology medium-paced
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Description

Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD...

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