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200 pages • missing pub info (editions)
ISBN/UID: 9780367393250
Format: Paperback
Language: English
Publisher: CRC Press
Publication date: 19 September 2019
Description
The role that friction and contact play in the processes of wear and planarization on material surfaces is central to the understanding of Chemical-Mechanical planarization (CMP) technology, particularly when applied to nanosurfaces. Tribology in ...
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200 pages • missing pub info (editions)
ISBN/UID: 9780367393250
Format: Paperback
Language: English
Publisher: CRC Press
Publication date: 19 September 2019
Description
The role that friction and contact play in the processes of wear and planarization on material surfaces is central to the understanding of Chemical-Mechanical planarization (CMP) technology, particularly when applied to nanosurfaces. Tribology in ...
Community Reviews
Content Warnings